Ion implantation is widely used as a means of introducing radiation damage in materials. Ion implantation in optical fibres ion implantation in optical fibres mcstay, d. Ion implantation, diffusion, and solubility of nd and er. This research studied the effect of ion implantation on electrical properties of isfets. Design of optical waveguides must consider effects induced by the ion implantation process, such as modification of substrate density, polarizability and.
Ion implantation and optical devices sciencedirect. Nanowires were synthesized using track etched filters via electrodeposition technique involving the movement of ions into the pores due to the. After the implantation without annealing, the ivcharacteristics of sourcedrain pn junction of isfet were performed and compared with the behaviour. Ion implantation is a lowtemperature process by which ions of one element are accelerated into a solid target, thereby changing the physical, chemical, or electrical properties of the target. Association of the 6ev optical band in sapphire with oxygen. International conference on ion implantation in semiconductors. Planar optical waveguides in znwo 4 crystals are fabricated by 5. We are a community of more than 103,000 authors and editors from 3,291 institutions spanning 160 countries, including nobel prize winners and some of the worlds mostcited researchers. Ion implantation is a process in which ions of a material are accelerated by an electrical field to impact a solid. H karge, k hohl, u jahn and u katenkamp, rad effects, to be published. Sio x layers with continuous depth profiles of the oxygen concentration are formed about 2. Conversely, implantation damage in more recent years has allowed for the possibility of new silicon based optoelectronic devices.
The basic principle of ion implantation in semiconductor technologies is described by shockley 1. Optical effects of ion implantation cambridge studies in. Pdf effect of nitrogen ion implantation on the optical. Structural changes can be inferred from ir measurements near cm. Ion implantation in optical fibres, proceedings of spie. By selection of ion energy and ion dose one can inject trace impurities that. Ion implantation page 6 introduction ion implant is used to put specific amounts of ntype and ptype dopants dose into a semiconductor. In the experiments the sensing membrane area were implanted with 3 types of ions boronb, phosphorusp, and arsenicas. Optical effects of ion implantation book, 1994 worldcat. Pdf effects of low energy h ion implantation on the. In general, optical waveguides can be improved by widening the optical barrier or waveguide core through multiple energy ion implantations.
No surface blistering or exfoliation was observed at any implant temperature. However, postimplant annealing step 900oc is required to anneal out defects. The implant can be precisely customized to reach specific. The contrasting effects of ion implantation and thermal annealing on structural and magnetic properties of copd multilayers have been studied.
Ion beam insulator ion source disk wafers target holder disk wafer load and unload area 100kv power supply source, magnet, power supply figure 8. Reliable information about the coronavirus covid19 is available from the world health organization current situation, international travel. Pdf analytical techniques for ion implantation2018 researchgate. In section iv, we reduce two ion implantation steps without affecting the performance of. Four dark modes were observed for extraordinary light at 633 nm, while. Although there are many ion implanted optical effects of absorption or. Thermal annealing generates massive interdiffusion across the interfaces into the formation of. Chapter 9 nitridation of gaas surface by low energy ion implantation. Ion implantation causes local damage to the multilayers, resulting in enhanced magnetization due to the polarization of the neighboring pd. Fibres are wound onto a bobin system for insertion into for insertion into fibres fibres are the chamber. Chapter 6 ion implantation universiti tunku abdul rahman. Beginning with an overview of the basic physics and practical methods involved in ion implantation, the topics of optical absorption and luminescence are then discussed. The depth scale accessible with small ion implanters i. Plaksin and others published optical effects in silica glass during implantation of 60kev cusup ions find, read and cite.
Ion implantation influences surface properties of all types of material, whether they be metal, semiconductor or insulator. Low loss planar optical waveguides were obtained and characterized by the prism coupling technique. Structural changes of the polymer were studied with. This process creates lattice damage which can adversely affect the device efficiency. Effects of ion implantation ion implantation commonly modifies the characteristics of the surface layer by introducing either ptype or ntype dopant ions into the host material. Thus, ion implantation was suggested as an approach to modify properties of insulating polymers, in particular, to turn them into semiconductors 2,3. Us20060114478a1 evaluating effects of tilt angle in ion.
The effects of ion implantation through very thin silicon. Xcut linbo3 crystals were implanted at room temperature by 6. Osa optical properties of planar waveguides on znwo4. Ion implantation defects amorphization secondary defects endofrange loops effect of defects onelectrical resistivitypn junction leakage currentdiffusionmechanical stress. Effect of tilt angle, at which ions are implanted into a semiconductor layer of a wafer, is evaluated by measuring reflectance of a region which has implanted ions in first areas that are interdigitated with a corresponding number of second areas lacking the implanted ions or having the same specie ions in a background concentration. We study the influence of ion implantation conditions on the performance of depletiontype silicon optical modulators by a combined simulation of the process flow, the electrical characteristic, and the beam propagation. Consequently, ion implantation has developed into a well established technique for the modification of surface layers with an extensive literature which covers the interaction of an incident ion beam on, and beneath, the surface of a solid target. Index termsdevice modeling, ion implantation, optical modulation, plasmadispersion effect, silicon photonics. We report on the optical properties of znwo 4 planar waveguides created by ion implantation, and the effect annealing has on these structures.
Contrarily to the implantation of conventional semiconductors aiming in doping, the idea of ion bombardment of polymers lies in a. Our work consists in the study of ion implantation effects on the linear and nonlinear optical properties of polymer thin films. The effects of ion implantation were studied using optical absorption spectroscopy, rutherford backscattering spectroscopy and ion channeling rbsc and transmission electron microscopy tem. Us6632482b1 plasma immersion ion implantation process. The damage increases with the dose more ions produce more damage. Berkeley ee143 f2010 defects tutorial 2 simple point defects elemental crystal. A chapter on waveguide analysis then provides the background for a description of particular optical devices, such as waveguide lasers, mirrors, and novel nonlinear materials. Implantation process for cold cathode plasma immersion ion implantation c 2 pi 3 without a continuous plasma using very short high voltage, low duty cycle ionization pulses, in conjunction with a synchronously produced electron flow to neutralize positively charged wafer surfaces. Ion implantation and ion mixing have made possible the production of new materials having new properties and new phases or structures. In absorption spectra obtained from the implanted samples, growth of an fcenter band at 5.
Ion channeling is another effect which may be important while implanting ions into. The dose is accurately measured during implantation giving outstanding control and repeatability. If the ions differ in composition from the target, namely, the specimen to be implanted, they will alter the elemental composition of the target and possibly change the physical, chemical, andor electrical properties of the specimen. Ion implantation is used in semiconductor device fabrication and in metal finishing, as well as in materials science research. Introduction ptical modulators which encode a bit stream onto the optical carrier are an essential functional component for any optical communication links ranging from telecommunications to optical interconnects. Modulated interference effects and thermal wave monitoring. Effects of dual implantations and annealing atmosphere on lattice.
Studies of the electrical and optical properties of. Pdf ion implantation of germanium into silicon for. The development of optoelectronic or even photonic devices based on silicon technology is still a great challenge. Advanced cmos device structure ion implant pearson distribution ion channeling implant damage. Ion implantation is a technique commonly used in the fabrication of semiconductor devices.
The monomode enhancedindex linbo3 waveguide excited at 1540 nm is reported. Effects of low energy h ion implantation on the optical properties of znmgo thin films. Ion implantation into silicon represents a prom ising platform to demonstrate a varie ty of optical devices incl uding the post fabrication trimming of optical filters 1016. Energetic ions penetrate the surface of the wafer and then undergo a. Oclcs webjunction has pulled together information and resources to assist library staff as they consider how to handle coronavirus. Optimization of ion implantation condition for depletion. Modulated interference effects and thermal wave monitoring of highdose ion implantation in semiconductors. The ions can alter the elemental composition of the target if the. Typically, the optical properties modification of material by implantation strongly depends on the chemical bonding in the matrix.
Effect of nitrogen ion implantation on the optical and structural characteristics of cr39 polymer article pdf available in journal of applied physics 1026 september 2007 with 353 reads. Silicon and its oxide do not possess direct optical transitions and, therefore, are not luminescent. Pdf optical effects in silica glass during implantation. Ion implantation in polymeric materials has recently attracted considerable attention in various technology and science fields. It is expected to remain as the mean for doping technique for the foreseeable future. A snapshot of a threedimensional dendrite in pure ni with a cubic interfacial energy anisotropy obtained from a phasefield simulation with thermal noises 72 courtesy of a.
The nonlinear optical properties of such colloids, in particular the enhancement of optical kerr susceptibility by both dielectric and quantumconfinement effects, suggest that the ion implantation technique may play an important role for the. Pdf ion implantation for semiconductor doping and materials. Numerous and frequentlyupdated resource results are available from this search. Osa monomode optical waveguide excited at 1540 nm in. Through calculations using different implantation positions, energies, and tilt angles, this paper reveals that a gap between specific implantation windows is able to. Specific regions can be implanted using a variety of masking materials including photoresist. For optical components in integrated optic circuits ion beams can be used to define mask patterns, etch. Ion implantation ii technology has been developed with a great economic success of industries of vlsi very largescale integrated circuit devices. Concentration and annealing effects on luminescence. Thermal annealing effects on the optical properties of erbium erionimplanted al x ga 1. Thus the investigations are extended to ion implantation into silica layers. The remaining weak light emission is based on intrinsic and extrinsic defect luminescence. The depth distribution of the changed optical properties is revealed by highresolution reflection and transmission profiles measured across the beveled surface of the irradiated samples.
Implantationinduced damage decreases the implanted volume in fused silica with consequent changes in the refractive index, the near. Owing in large part to the pronounced nonlinear effects and the associated applications, numerous types of metallic. Thus, the maximum damage roughly corresponds with the ion range, r p. Development of optical waveguides through multipleenergy. Ion implantation can be used to introduce network damage and to alter the chemical composition in glasses. Optical and structural effects of ion implantation in. Synergistic effect of vn codoping by ion implantation on the electronic and optical properties of tio2. Present study shows the effect of fe implantation dose on cds nanowires. Effect of iron ion implantation dose on optical and structural properties of cds nanowires. The objective of the material modification differs according to the location being doped. Under sufficiently high dose and energy, ions implanted into a semiconductor will produce an amorphous layer throughout the range in which nuclear stopping is the dominant mechanism for slowing the ions.
Hydrogen and helium implantation in vitreous silica. Effect of iron ion implantation dose on optical and. Nuclear instruments and methods in physics research section b. Optical effects of ion implantation 457 a has an index only slightly less than that of the unimplanted region c. This project started with developing god quality planar waveguides based on a wellknown photoconductor polymer, the polyvinylcabazole. The effect of ion implantation on isfetsensing membrane.
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